Friction based locomotion module for mobile MEMS robots

The “Modulated Friction Inertial Drive (MFID) principle” is presented as a locomotion solution for mmsize micro robots dealing with both size constraints and limitations in terms of power consumption. Based on one of the configurations of this locomotion principle a locomotion module (10 × 10 mm2) with two degrees of freedom (X,ThetaZ) has been developed. It consists of two horizontally vibrating masses actuated by electrostatic comb drives and fabricated by DRIE on a SOI wafer. The design as well as calculated and measured actuator displacements and resonance frequencies are presented. First locomotion experiments have shown a linear velocity of 0.207 mm/s for a driving voltage of 30 Vp2p and a power consumption of only 16.6 μW.

Published in:
IEEE/RSJ International Conference on Intelligent Robots and Systems, Proceedings of the, 3815-3820
Presented at:
Intelligent Robots and Systems, 2007 IEEE/RSJ International Conference on, San Diego, CA, 29 October - 2 November 2007

Note: The status of this file is: EPFL only

 Record created 2007-11-08, last modified 2019-08-12

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