000113929 001__ 113929
000113929 005__ 20180318102731.0
000113929 037__ $$aCONF
000113929 245__ $$aEtching of sub-micrometer structures through Stencil
000113929 269__ $$a2007
000113929 260__ $$bElsevier$$c2007
000113929 336__ $$aConference Papers
000113929 700__ $$0240380$$aVillanueva, G.$$g176631
000113929 700__ $$0240328$$aVazquez-Mena, O.$$g169048
000113929 700__ $$0240119$$avan den Boogaart, M. A. F.$$g152156
000113929 700__ $$0240329$$aSidler, K.$$g172982
000113929 700__ $$0245968$$aSavu, V.$$g176597
000113929 700__ $$0240120$$aBrugger, J.$$g145781
000113929 7112_ $$a33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), 23-26 Sept, 2007, Copenhagen, Denmark$$cCopenhagen, Denmark$$d23-26 Sept, 2007
000113929 773__ $$tMicroelectronic Engineering Journal
000113929 8564_ $$s557420$$uhttps://infoscience.epfl.ch/record/113929/files/Villanueva_2007_MNE.pdf$$zn/a
000113929 909CO $$ooai:infoscience.tind.io:113929$$pconf$$pSTI
000113929 909C0 $$0252546$$pNEMS$$xU12739
000113929 909C0 $$0252040$$pLMIS1$$xU10321
000113929 917Z8 $$x176631
000113929 937__ $$aLMIS1-CONF-2007-014
000113929 973__ $$aEPFL$$rREVIEWED$$sPUBLISHED
000113929 980__ $$aCONF