Etching of sub-micrometer structures through Stencil
2008
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Details
Title
Etching of sub-micrometer structures through Stencil
Author(s)
Villanueva, G. ; Vazquez-Mena, O. ; van den Boogaart, M. A. F. ; Sidler, K. ; Savu, V. ; Brugger, J.
Published in
Microelectronic Engineering Journal
Volume
85
Issue
5-6
Pages
1010-1014
Conference
33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), 23-26 Sept, 2007, Copenhagen, Denmark, Copenhagen, Denmark, 23-26 Sept, 2007
Date
2008
Publisher
Elsevier
Record Appears in
Scientific production and competences > STI - School of Engineering > IGM - Institute of Mechanical Engineering > NEMS - Advanced Nano-electromechanical Systems Laboratory
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2007-11-07