Active isolation of electronic micro-components with piezoelectrically transduced silicon MEMS devices
2007
Details
Title
Active isolation of electronic micro-components with piezoelectrically transduced silicon MEMS devices
Author(s)
Meyer, Y. ; Verdot, T. ; Collet, M. ; Baborowski, J. ; Muralt, P.
Published in
Smart Materials & Structures
Volume
16
Issue
1
Pages
128-134
Date
2007
ISSN
0964-1726
Other identifier(s)
DAR: 9844
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Laboratories
LC
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2007-10-18