Raman spectroscopy of sputtered AlN films: E-2(high) biaxial strain dependence
2006
Details
Title
Raman spectroscopy of sputtered AlN films: E-2(high) biaxial strain dependence
Author(s)
Trodahl, H. J. ; Martin, F. ; Muralt, P. ; Setter, N.
Published in
Applied Physics Letters
Volume
89
Issue
6
Pages
061905
Date
2006
ISSN
0003-6951
Note
061905
Other identifier(s)
DAR: 9081
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Laboratories
LC
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2007-10-18