Process optimization for the sputter deposition of molybdenum thin films as electrode for AlN thin films
2006
Details
Title
Process optimization for the sputter deposition of molybdenum thin films as electrode for AlN thin films
Author(s)
Martin, F. ; Muralt, P. ; Dubois, M. A.
Published in
Journal Of Vacuum Science & Technology A
Volume
24
Issue
4
Pages
946-952
Date
2006
ISSN
0734-2101
Other identifier(s)
DAR: 8939
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Laboratories
LC
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2007-10-18