Shear mode coupling and tilted grain growth of AlN thin films in BAW resonators
2006
Details
Title
Shear mode coupling and tilted grain growth of AlN thin films in BAW resonators
Author(s)
Martin, F. ; Jan, M. E. ; Rev-Mermet, S. ; Belgacem, B. ; Su, D. ; Cantoni, M. ; Muralt, P.
Published in
Ieee Transactions On Ultrasonics Ferroelectrics And Frequency Control
Volume
53
Issue
7
Pages
1339-1343
Date
2006
ISSN
0885-3010
Other identifier(s)
View record in Web of Science
Laboratories
LC
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2007-10-18