Shear mode coupling and properties dispersion in 8 GHz range AlN thin film bulk acoustic wave (BAW) resonator
2006
Details
Title
Shear mode coupling and properties dispersion in 8 GHz range AlN thin film bulk acoustic wave (BAW) resonator
Author(s)
Martin, F. ; Jan, M. E. ; Belgacem, B. ; Dubois, M. A. ; Muralt, P.
Published in
Thin Solid Films
Volume
514
Issue
1-2
Pages
341-343
Date
2006
ISSN
0040-6090
Other identifier(s)
DAR: 8958
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Laboratories
LC
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2007-10-18