Shear mode coupling and properties dispersion in 8 GHz range AlN thin film bulk acoustic wave (BAW) resonator


Published in:
Thin Solid Films, 514, 1-2, 341-343
Year:
2006
Note:
0040-6090
Other identifiers:
Laboratories:




 Record created 2007-10-18, last modified 2018-03-17


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