Fabrication of Fresnel zone plates for hard X-rays

A method to fabricate gold structures with high aspect ratio is presented. Fresnel zone plates with an outermost zone width of 100nm and structures of 1μm height are fabricated. Preliminary focusing results at an X-ray energy of 8keV are presented and ways to improve the zone plate parameters are discussed.


Published in:
Microelectronic Engineering, 84, 5-8, 1467-1470
Year:
2007
ISSN:
0167-9317
Laboratories:




 Record created 2007-10-11, last modified 2018-01-28


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