Fabrication of Fresnel zone plates for hard X-rays
A method to fabricate gold structures with high aspect ratio is presented. Fresnel zone plates with an outermost zone width of 100nm and structures of 1μm height are fabricated. Preliminary focusing results at an X-ray energy of 8keV are presented and ways to improve the zone plate parameters are discussed.
Record created on 2007-10-11, modified on 2016-08-08