Coherent grazing exit x-ray scattering geometry for probing the structure of thin films

We demonstrate a diffraction geometry which provides strong sensitivity to the microstructure of thin films. While a coherent beam of X-rays is being reflected from the surface of the sample, measurements were made of the scattering of the exit beam below the critical angle for total external reflection. This results in a strong signal with speckle modulations that are characteristic of the internal arrangement of grains at different depths within the film


Published in:
Applied Physics Letters, 84, 11, 1847-1849
Year:
2004
ISSN:
0003-6951
Laboratories:




 Record created 2007-10-11, last modified 2018-01-28


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