000112458 001__ 112458
000112458 005__ 20180317092601.0
000112458 037__ $$aCONF
000112458 245__ $$aMEMS Tunable Capacitors With Fragmented Electrodes and Electro-Thermal Actuation
000112458 269__ $$a2004
000112458 260__ $$c2004
000112458 336__ $$aConference Papers
000112458 700__ $$0240910$$aMehdaoui, A.$$g158513
000112458 700__ $$aCasset, F.
000112458 700__ $$aBouche, G.
000112458 700__ $$aAncey, P.
000112458 700__ $$0241430$$aIonescu, A. M.$$g122431
000112458 773__ $$t15th MicroMechanics Europe Workshop
000112458 909CO $$ooai:infoscience.tind.io:112458$$pSTI$$pconf
000112458 909C0 $$0252177$$pNANOLAB$$xU10328
000112458 937__ $$aNANOLAB-CONF-2004-002
000112458 973__ $$aEPFL$$rNON-REVIEWED$$sPUBLISHED
000112458 980__ $$aCONF