MEMS Tunable Capacitors With Fragmented Electrodes and Electro-Thermal Actuation
2004
Details
Title
MEMS Tunable Capacitors With Fragmented Electrodes and Electro-Thermal Actuation
Author(s)
Mehdaoui, A. ; Casset, F. ; Bouche, G. ; Ancey, P. ; Ionescu, A. M.
Published in
15th MicroMechanics Europe Workshop
Date
2004
Laboratories
NANOLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2007-10-10