Novel Technique for Nanograin Ultra-Thin Polysilicon Film Deposition and Implantation
2003
Details
Title
Novel Technique for Nanograin Ultra-Thin Polysilicon Film Deposition and Implantation
Author(s)
Ecoffey, S. ; Bouvet, D. ; Fazan, P. ; Tringe, J. ; Ionescu, A. M.
Published in
2003 International Semiconductor Conference. CAS 2003 Proceedings
Volume
1
Pages
47-50
Date
2003
Other identifier(s)
View record in Web of Science
Laboratories
NANOLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2007-10-10