A Study of Fabrication Techniques for Sub-10nm Thin Undulated Polysilicon Films
2003
Details
Title
A Study of Fabrication Techniques for Sub-10nm Thin Undulated Polysilicon Films
Author(s)
Badila, N. ; Ecoffey, S. ; Bouvet, D. ; Ionescu, A. M.
Published in
2003 International Semiconductor Conference. CAS 2003 Proceedings
Volume
1
Pages
95-98
Date
2003
Laboratories
NANOLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2007-10-10