Dry Etching Techniques of Amorphous Silicon for Suspended Metal Membrane RF MEMS Capacitors
2002
Details
Title
Dry Etching Techniques of Amorphous Silicon for Suspended Metal Membrane RF MEMS Capacitors
Author(s)
Fritschi, R. ; Hibert, C. ; Flückiger, Ph. ; Ionescu, A. M.
Published in
MRS Proceedings
Volume
729
Pages
U2.7
Conference
MRS Spring Meeting
Date
2002
Other identifier(s)
View record in Web of Science
Laboratories
NANOLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2007-10-10