LPCVD deposition of nanograin polysilicon ultra-thin films
2002
Details
Title
LPCVD deposition of nanograin polysilicon ultra-thin films
Author(s)
Ecoffey, S. ; Bouvet, D. ; Ionescu, A. M. ; Fazan, P.
Published in
Journal of Nanotechnology
Volume
13
Issue
3
Pages
290-293
Date
2002
Laboratories
NANOLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2007-10-10