Reusability of nanostencils for the patterning of Aluminum nanostructures by selective wet etching
2007
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Abstract
Reusability of nanostencils for the patterning of Aluminum nanostructures by selective wet etching
Details
Title
Reusability of nanostencils for the patterning of Aluminum nanostructures by selective wet etching
Author(s)
Vázquez-Mena, O. ; Villanueva, Guillermo ; van den Boogaart, M. A. F. ; Savu, V. ; Brugger, J.
Conference
33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007
Date
2007
Record Appears in
Scientific production and competences > STI - School of Engineering > IGM - Institute of Mechanical Engineering > NEMS - Advanced Nano-electromechanical Systems Laboratory
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Work produced at EPFL
Published
Posters
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Work produced at EPFL
Published
Posters
Record creation date
2007-09-25