Towards Reliable 100-Nanometer Scale Stencil Lithography on Full Wafer: Progress AND Challenges
2007
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Details
Title
Towards Reliable 100-Nanometer Scale Stencil Lithography on Full Wafer: Progress AND Challenges
Author(s)
Vazquez Mena, O. ; van den Boogaart, M.A.F. ; Brugger, J.
Conference
14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, 10-14 June, 2007
Date
2007
Laboratories
LMIS1
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Presentations & Talks
Work produced at EPFL
Published
Presentations & Talks
Work produced at EPFL
Published
Record creation date
2007-09-14