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Full wafer integration of NEMS on CMOS by nanostencil lithography
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Full wafer integration of NEMS on CMOS by nanosten[...]
-
Arcamone, J.
et al
main
file(s):
Arcamone_ 2006_IEDM
version 1
Arcamone_ 2006_IEDM.pdf
[2.6 MB]
27 Jan 2018, 13:01
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