Integrated Nickel Micro-Nano-Hall Sensors on SU-8 Cantilevers for Scanning Hall Probe Microscopy
Mouaziz, S.; Imboden, C.; Santschi, C.; Vazquez Mena, O.; Popovic, R.; Brugger, J.; Boero, G.
2007
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Abstract

We report the fabrication and characterization of nickel Hall sensors integrated on SU-8 cantilevers. Sensors having active area down to 1x1 μm 2 show a magnetic field resolution better than 1μT/Hz 1/2 in the thermal noise frequency range. The fabricated devices have been tested for magnetic imaging using the scanning Hall probe microscopy technique.

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Title Integrated Nickel Micro-Nano-Hall Sensors on SU-8 Cantilevers for Scanning Hall Probe Microscopy
Author(s) Mouaziz, S. ; Imboden, C. ; Santschi, C. ; Vazquez Mena, O. ; Popovic, R. ; Brugger, J. ; Boero, G.
Published in Transducers '07 & Eurosensors XXI, Digest Of Technical Papers
Pages 2589-2592
Conference 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, June 10-14, 2007
Date 2007
Publisher IEEE
ISBN 978-1-4244-0841-2
DOI https://doi.org/10.1109/SENSOR.2007.4300701
Other identifier(s) View record in Web of Science
Laboratories LMIS1
LMIS3
Record Appears in Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Scientific production and competences > STI - School of Engineering > STI Archives > LMIS3 - Microsystems Laboratory 3
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date 2007-09-13

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