INTEGRATED NICKEL MICRO-NANO-HALL SENSORS ON SU-8 CANTILEVERS FOR

We report the fabrication and characterization of nickel Hall sensors integrated on SU-8 cantilevers. Sensors having active area down to 1x1 􀀃m2 show a magnetic field resolution better than 1 􀀃T/Hz1/2 in the thermal noise frequency range. The fabricated devices have been tested for magnetic imaging using the scanning Hall probe microscopy technique.


Published in:
Digest of Technical Papers, 2589-2592
Presented at:
14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, June 10-14 , 2007,
Year:
2007
Publisher:
Lyon, France, Transducers ’07
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2007-09-13, last modified 2018-03-17

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