INTEGRATED NICKEL MICRO-NANO-HALL SENSORS ON SU-8 CANTILEVERS FOR
We report the fabrication and characterization of nickel Hall sensors integrated on SU-8 cantilevers. Sensors having active area down to 1x1 m2 show a magnetic field resolution better than 1 T/Hz1/2 in the thermal noise frequency range. The fabricated devices have been tested for magnetic imaging using the scanning Hall probe microscopy technique.
Record created on 2007-09-13, modified on 2016-08-08