Fabrication of two-dimensional InP-based photonic crystals by chlorine based chemically assisted ion beam etching
2004
Details
Title
Fabrication of two-dimensional InP-based photonic crystals by chlorine based chemically assisted ion beam etching
Author(s)
Mulot, M. ; Anand, S. ; Ferrini, R. ; Wild, B. ; Houdré, R. ; Moosburger, J. ; Forchel, A.
Published in
Journal of Vacuum Science & Technology B
Volume
22
Issue
2
Pages
707-709
Date
2004
Other identifier(s)
DAR: 5063
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Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SB Archives > LOEQ - Laboratory of Quantum Optoelectronics
Scientific production and competences > SB - School of Basic Sciences > IPHYS - Institute of Physics > SCI-SB-RH - Groupe SCI SB RH
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Scientific production and competences > SB - School of Basic Sciences > IPHYS - Institute of Physics > SCI-SB-RH - Groupe SCI SB RH
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2007-08-31