Co-integration of gate-all-around MOSFETs and local silicon-on insulator optical waveguides on bulk silicon for GHz on-chip optical signaling


Published in:
Proceedings of IEEE 2006 silicon nanoelectronics workshop, VLSI 2006 workshop, 31-32
Year:
2006
Laboratories:




 Record created 2007-05-16, last modified 2018-03-18


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