MEMS Tunable Capacitor with laterally driven fragmented electrodes and electro-thermal actuation
2006
Details
Title
MEMS Tunable Capacitor with laterally driven fragmented electrodes and electro-thermal actuation
Author(s)
Mehdaoui, A. ; Tsamados, D. ; Casset, F. ; Ionescu, A. M. ; Ancey, P.
Published in
MEMSWAVE 2006
Date
2006
Laboratories
NANOLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2007-05-16