MEMS Tunable Capacitor with Fragmented Electrodes and Rotational Electro-Thermal Drive
2006
Details
Title
MEMS Tunable Capacitor with Fragmented Electrodes and Rotational Electro-Thermal Drive
Author(s)
Mehdaoui, A. ; Pisani, M. B. ; Tsamados, D. ; Casset, F. ; Ancey, P. ; Ionescu, A. M.
Published in
Proceedings of the 2006 Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, DTIP 2006
Date
2006
Other identifier(s)
View record in Web of Science
DAR: 11999
DAR: 11999
Laboratories
NANOLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2007-05-16