Vertical co-integration of AlSi MEMS tunable capacitors and Cu inductors for tunable LC blocks
2006
Details
Title
Vertical co-integration of AlSi MEMS tunable capacitors and Cu inductors for tunable LC blocks
Author(s)
Mehdaoui, A. ; Pisani, M. B. ; Fritschi, R. ; Ancey, P. ; Ionescu, A. M.
Published in
MNE 2006
Date
2006
Other identifier(s)
DAR: 10746
View record in Web of Science
View record in Web of Science
Laboratories
NANOLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2007-05-16