Fabrication of Silicon-On-Insulator MEM Resonators with Deep Sub-Micron Transduction Gaps
2006
Details
Title
Fabrication of Silicon-On-Insulator MEM Resonators with Deep Sub-Micron Transduction Gaps
Author(s)
Badila, N.-D. ; Hibert, C. ; Mazza, M. ; Ionescu, A. M.
Published in
Proceedings of the 2006 Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, DTIP 2006
Date
2006
Other identifier(s)
View record in Web of Science
Laboratories
NANOLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2007-05-16