Fabrication of Silicon-On-Insulator MEM Resonators with Deep Sub-Micron Transduction Gaps


Published in:
Proceedings of the 2006 Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, DTIP 2006
Year:
2006
Laboratories:




 Record created 2007-05-16, last modified 2018-03-17


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