Ultra-low voltage MEMS resonator based on RSG-MOSFET
2006
Details
Title
Ultra-low voltage MEMS resonator based on RSG-MOSFET
Author(s)
Abelé, N. ; Séguéni, K. ; Boucart, K. ; Casset, F. ; Buchaillot, L. ; Ancey, P. ; Ionescu, A. M.
Published in
MEMS 2006
Pages
882-885
Date
2006
Other identifier(s)
View record in Web of Science
Laboratories
NANOLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2007-05-16