High Performance Copper / Polyimide Inductors Fabricated Using Thick Double Metal Layer Damascene Process
2005
Details
Title
High Performance Copper / Polyimide Inductors Fabricated Using Thick Double Metal Layer Damascene Process
Author(s)
Pisani, M. B. ; Hibert, C. ; Bouvet, D. ; Dehollain, C. ; Ionescu, A. M.
Published in
6th Workshop on MEMS for MillimeterWAVE communications (MEMSWAVE 2005)
Date
2005
Laboratories
NANOLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2007-05-16