High Performance Copper / Polyimide Inductors Fabricated Using Thick Double Metal Layer Damascene Process


Published in:
6th Workshop on MEMS for MillimeterWAVE communications (MEMSWAVE 2005)
Year:
2005
Laboratories:




 Record created 2007-05-16, last modified 2018-03-17


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)