Nanostencil-based lithography for silicon nanowires fabrication
2005
Details
Title
Nanostencil-based lithography for silicon nanowires fabrication
Author(s)
Grogg, D. ; Santschi, C. ; Pott, V. ; Ionescu, A. M. ; Brugger, J.
Published in
Nanoelectronics Days 2005
Date
2005
Laboratories
NANOLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2007-05-16