Polyimide sacrificial layer process for SOI SG-MOSFET pressure sensor


Published in:
31st International Conference on Micro- and Nano-Engineering
Presented at:
31th International Conference on Micro- and Nano-Engineering (MNE) , Vienna, Austria , September 19-22, 2005
Year:
2005
Laboratories:




 Record created 2007-05-16, last modified 2018-03-17


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