Design and Fabrication Issues in Ultra-Thin Film SOI MEMS resonators
2005
Details
Title
Design and Fabrication Issues in Ultra-Thin Film SOI MEMS resonators
Author(s)
Buchheit, K. ; Abelé, N. ; Ionescu, A. M.
Published in
EuroSOI 2005
Date
2005
Laboratories
NANOLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2007-05-16