Electro-Mechanical Modeling of MEMS Resonators with MOSFET detection
2005
Details
Title
Electro-Mechanical Modeling of MEMS Resonators with MOSFET detection
Author(s)
Abelé, N. ; Pott, V. ; Boucart, K. ; Casset, F. ; Séguéni, K. ; Ancey, P. ; Ionescu, A. M.
Published in
MSM 2005 (Nanotech)
Date
2005
Laboratories
NANOLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2007-05-16