000104468 001__ 104468
000104468 005__ 20190812205059.0
000104468 037__ $$aCONF
000104468 245__ $$aElectro-Mechanical Modeling of MEMS Resonators with MOSFET detection
000104468 269__ $$a2005
000104468 260__ $$c2005
000104468 336__ $$aConference Papers
000104468 700__ $$0242553$$g165147$$aAbelé, N.
000104468 700__ $$0241220$$g113948$$aPott, V.
000104468 700__ $$0241223$$g163875$$aBoucart, K.
000104468 700__ $$aCasset, F.
000104468 700__ $$aSéguéni, K.
000104468 700__ $$aAncey, P.
000104468 700__ $$aIonescu, A. M.$$g122431$$0241430
000104468 773__ $$tMSM 2005 (Nanotech)
000104468 909C0 $$xU10328$$pNANOLAB$$0252177
000104468 909CO $$pconf$$pSTI$$ooai:infoscience.epfl.ch:104468
000104468 937__ $$aNANOLAB-CONF-2005-018
000104468 970__ $$a21/LEG2
000104468 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000104468 980__ $$aCONF