Micro- and nano-patterning using local deposition through miniaturized shadow mask
2003
Abstract
not available
Details
Title
Micro- and nano-patterning using local deposition through miniaturized shadow mask
Author(s)
Kim, G M ; Brugger, J
Published in
Proceedings of 5th Korean MEMS Conference
Conference
5th Korean MEMS Conference, Jeju, Korea, 15-17 May, 2003
Date
2003
Laboratories
LMIS1
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2007-04-13