Fabrication of an active nanostencil with intergrated microshutters
2003
Abstract
not available
Details
Title
Fabrication of an active nanostencil with intergrated microshutters
Author(s)
Tjerkstra, R W ; Ekkels, P ; Krijnen, G ; Egger, S ; Berenschot, E ; Ma, K C ; Brugger, J
Published in
Proceedings of 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’03)
Volume
2
Pages
1651-1654
Conference
12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’2003), Boston, USA, 8-12 June, 2003
Date
2003
Laboratories
LMIS1
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2007-04-13