Conference paper

90 MHz nanomechanical structures fabricated by stencil deposition and dry etching

We present a simple method for fabricating fast resonating (90 MHz) nanomechanical elements based on the local deposition through a miniaturized shadow mask (nanostencil), followed by dry etching to release the structure from the substrate. The measured resonance frequency of a fabricated nanomechanical structure shows high resonance frequency up to 90 MHz. This resistless and dry process provides a flexible, rapid and stiction-free approach for the fabrication of ultra-fast resonating elements in various materials.


    • LMIS1-CONF-2007-004

    Record created on 2007-04-13, modified on 2017-05-10


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