Exploring microstencils for sub-micron patternig using Pulsed Laser Deposition
2003
Abstract
not available.
Details
Title
Exploring microstencils for sub-micron patternig using Pulsed Laser Deposition
Author(s)
Vroegindeweij, F ; Steen, J ; Brugger, J ; Blank, D H A
Published in
Proceedings of 7th International Conference on Laser Ablation
Conference
7th International Conference on Laser Ablation, Hersonissos, Crete, Greece, 5-10 Oct, 2003
Date
2003
Laboratories
LMIS1
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2007-04-13