The authors have produced YBaCuO thin films by mono-target ion beam sputtering. Post annealing in O2 at 850°C results in superconducting films on (100) SrTiO3 with R=0 at ~60 K. Preliminary results of chemical analysis of the films by X-ray photoelectron spectroscopy (XPS), as well as combined secondary ion mass (SIMS) and Auger electron spectroscopy (AES) indicate formation of hydroxides and carbonates in the surface of samples and somewhat lower concentration of oxygen than the optimal value of 6.9