000101371 001__ 101371
000101371 005__ 20190316233941.0
000101371 037__ $$aCONF
000101371 245__ $$aSurface Micromachining of Polyureasilazane Based Ceramic-MEMS using SU-8 Micromolds
000101371 269__ $$a2006
000101371 260__ $$c2006
000101371 336__ $$aConference Papers
000101371 520__ $$aWe describe a novel surface micromachining process for the fabrication of ceramic-type MEMS devices, such as free-standing cantilevers, that is based on the use of high-aspect ratio micromolds of SU8 and aluminum as sacrificial layer. 250μm-high and 100-1000μm-wide molds were used to confine a liquid precursor of SiC/Si3N4 based ceramics on the sacrificial layer that enables the detachment of the green body before the pyrolysis step at 1000°C. The final ceramic cantilever has dimensions ranging from 100-500um x 1-2mm x 50um and a smooth surface. Details of the processing, structural and material characterization such as Dynamic Rheological and Thermogravimetric Analysis under UV will be presented and compared to those found in the literature.
000101371 700__ $$0240303$$g129146$$aFakhfouri, V
000101371 700__ $$aJiguet, S
000101371 700__ $$aBrugger, J$$g145781$$0240120
000101371 7112_ $$d4-9 June, 2006$$cSicily, Italy $$aCIMTEC 2006 (11th International Conferences on Modern Materials and Technologies)
000101371 773__ $$j45$$tAdvances in Science and Technology$$q1293-1298
000101371 8564_ $$uhttps://infoscience.epfl.ch/record/101371/files/Fakhfouri_2006_CIMTEC.pdf$$zn/a$$s1013601
000101371 909C0 $$xU10321$$0252040$$pLMIS1
000101371 909CO $$ooai:infoscience.tind.io:101371$$qGLOBAL_SET$$pconf$$pSTI
000101371 937__ $$aLMIS1-CONF-2007-001
000101371 973__ $$rNON-REVIEWED$$sPUBLISHED$$aEPFL
000101371 980__ $$aCONF