Abstract
not available
Details
Title
MEMS-based nanopatterning and NEMS
Author(s)
Brugger, J
Conference
1st Nanospain workshop, San Sebastian, Sapin, 10-12 March, 2004
Date
2004
Laboratories
LMIS1
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Presentations & Talks
Work produced at EPFL
Published
Presentations & Talks
Work produced at EPFL
Published
Record creation date
2007-03-06