Exploring microstencils for sub-micron patternig using Pulsed Laser Deposition
Vroegindeweij, F; Steen, J; Brugger, J; Blank, D H A
2003

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Title Exploring microstencils for sub-micron patternig using Pulsed Laser Deposition
Author(s) Vroegindeweij, F ; Steen, J ; Brugger, J ; Blank, D H A
Conference 7th International Conference on Laser Ablation, Hersonissos, Crete, Greece, 5-10 Oct, 2003
Date 2003
Laboratories LMIS1
Record Appears in Scientific production and competences > STI - School of Engineering > IMT - Institute of Microengineering > LMIS1 - Microsystems Laboratory 1
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