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Exploring microstencils for sub-micron patternig using Pulsed Laser Deposition

Vroegindeweij, F ; Steen, J ; Brugger, J ; Blank, D H A

not available


Presented at:
7th International Conference on Laser Ablation, Hersonissos, Crete, Greece, 5-10 Oct, 2003
Year:
2003
Laboratories:
LMIS1

Record appears in:
Scientific production and competences > STI - School of Engineering > IMT - Institute of Microengineering > LMIS1 - Microsystems Laboratory 1
Work produced at EPFL
Published
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 Record created 2007-03-02, last modified 2018-03-17


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