000101033 001__ 101033
000101033 005__ 20180317095347.0
000101033 037__ $$aPOST_TALK
000101033 245__ $$aMicro- and nano-patterning using local deposition through miniaturized shadow mask
000101033 269__ $$a2003
000101033 260__ $$c2003
000101033 336__ $$aTalks
000101033 520__ $$anot available
000101033 700__ $$0240644$$aKim, G M$$g149003
000101033 700__ $$0240120$$aBrugger, J$$g145781
000101033 7112_ $$a5th Korean MEMS Conference$$cJeju, Korea$$d15-17 May, 2003
000101033 909CO $$ooai:infoscience.tind.io:101033$$ppresentation$$pSTI
000101033 909C0 $$0252040$$pLMIS1$$xU10321
000101033 937__ $$aLMIS1-PRESENTATION-2007-021
000101033 973__ $$aEPFL$$sPUBLISHED
000101033 980__ $$aTALK