Unconventional micro/nano patterning method combining shadow-mask pattern and micro-contact printing
2002
Abstract
not available
Details
Title
Unconventional micro/nano patterning method combining shadow-mask pattern and micro-contact printing
Author(s)
Kim, B J ; Kim, G M ; Lathika, S T ; Brugger, J
Conference
1st International conference on Nanoimprint and Nanoprint Technology, San Francisco, USA, 11-13 Dec, 2002
Date
2002
Laboratories
LMIS1
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Presentations & Talks
Work produced at EPFL
Published
Presentations & Talks
Work produced at EPFL
Published
Record creation date
2007-03-02