Nanomechanical structure can be made without lithography
2002
Abstract
not available
Details
Title
Nanomechanical structure can be made without lithography
Author(s)
Kim, G M ; van den Boogaart, M A F ; Brugger, J
Conference
Gordon Research Conference on Nanostructure Fabrication, Tilton NH, USA, 4-9 Aug, 2002
Date
2002
Laboratories
LMIS1
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Work produced at EPFL
Published
Posters
Work produced at EPFL
Published
Posters
Record creation date
2007-03-02