SAMs meet MEMS - surface modification with self-assembled monolayers for the dry-demolding of photoplastic MEMS/NEMS
2001
Abstract
not available
Details
Title
SAMs meet MEMS - surface modification with self-assembled monolayers for the dry-demolding of photoplastic MEMS/NEMS
Author(s)
Kim, B J ; Kim, G M ; Liebau, M ; Huskens, J ; Reinhoudt, D N ; Brugger, J
Conference
IEEE International Workshop on MEMS 2001, Interlaken, Switzerland, 21-25 Jan, 2001
Date
2001
Laboratories
LMIS1
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Work produced at EPFL
Published
Posters
Work produced at EPFL
Published
Posters
Record creation date
2007-03-02