SAMs meet MEMS - surface modification with self-assembled monolayers for the dry-demolding of photoplastic MEMS/NEMS

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Presented at:
IEEE International Workshop on MEMS 2001, Interlaken, Switzerland, 21-25 Jan, 2001
Year:
2001
Laboratories:




 Record created 2007-03-02, last modified 2018-03-17


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